Hydrogenated Amorphous Silicon氢化非晶硅

出版日期:2005-9
ISBN:9780521019347
作者:Street, R.A.
页数:432页

书籍目录

Preface1 Introduction 1.1 Early research 1.2 Basic concepts of amorphous semiconductors  1.2.1 Atomic structure  1.2.2 Chemical bonding, the 8-N rule and defect reactions  1.2.3 Electronic structure  1.2.4 Electronic properties  1.2.5 Localization, the mobility edge and conduction2 Growth and structure of amorphous silicon 2.1 Growth of a-Si: H  2.1.1 The morphology of film growth  2.1.2 Growth mechanisms 2.2  The silicon bonding structure  2.2.1 Silicon-silicon atomic bonding  2.2.2 Intermediate range order, network voids and stress  2.2.3 Network vibrations 2.3  The hydrogen bonding structure  2.3.1 Silicon-hydrogen bonds  2.3.2 The hydrogen local order  2.3.3 Hydrogen diffusion, evolution and rehydrogenation  2.3.4 The role of hydrogen in the growth of a-Si : H  2.3.5 Hydrogen in amorphous and crystalline silicon3 The electronic density of states 3.1 The conduction and valence bands  3.1.1 Measurements of the conduction and valence band density of states 3.2 The band tails  3.2.1 Dispersive trapping in a band tail  3.2.2  The band tail density of states distribution 3.3  0ptical band.t0.band transitions  3.3.1  The Urbach edge  3.3.2 Thermal and static disorder4 Defects and their electronic states 4.1 Defects in amorphous semiconductors  4.1.1 Lattice relaxation at defects  4.1.2  Correlation energies  4.1.3  Valence alternation pairs—the example of selenium 4.2 Experimental measurements of defects  4.2.1  Electron spin resonance(ESR)  4.2.2  ESR hyperfine interactions  4.2.3 Defect level spectroscopy—thermal emission energies  4.2.4 Defect level spectroscopy—optical transition energms  4.2.5  Summary 4.3 Defect Models5 Substitutional doping 5.1 Growth and structure of doped a.Si:H 5.2 The electronic effects of doping  5.2.1 Defects induced by doping  5.2.2  Shallow electronic states  5.2.3 The doping efficiency  5.2.4  Compensated a.Si:H 5.3 The doping mechanism  5.3.1 Discussion of the doping model6 Defect reactions,thermal equilibrium and metastability 6.1  Evidence of structural equilibration 6.2 Thermal equilibrium models  6.2.1 Theory of chemical equilibrium  6.2.2 DefeCt and dopant equilibrium with discrete formation energies  6.2.3 Distributions of formation energies——the weak bond model  6.2.4 The role of the band tails and deposition conditions  ……7  Electronic transport8  The recombination of excess carriers9  Contacts,interfaces and multilayers10  Amorphous silicon device technologyReferencesIndex

作者简介

This book describes the properties and device applications of hydrogenated amorphous silicon. It covers the growth, the atomic and electronic structure, the properties of dopants and defects, the optical and electronic properties which result from the disordered structure and finally the applications of this technologically very important material. There is also an important chapter on contacts, interfaces and multilayers. The main emphasis of the book is on the new physical phenomena which result from the disorder of the atomic structure. The book will be of major importance to those who are researching or studying the properties and applications of a-Si:H. It will have a wider interest for anyone working in semiconductor physics and electronic engineering in general.


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